Current oxygen sensors required for in-situ oxygen monitoring inside a process chamber in semiconductor manufacturing processes (such as ALD, epi CVD and PVD) are limited in operating pressure and temperature ranges.
Transition metal oxides are highly sensitive to gases environment. Doping diamond coating with them results in a highly conductive sheet which is highly sensitive to the transition-metal oxide properties and changes. This layer can be a very stable and sensitive oxygen sensor.
- Highly sensitive to oxygen level
- Stable coating at different environments
Applications and Opportunities
- In-situ sensor for gases
- Sensitive manufacturing processes