PZT based multilayer actuators

Prof. Gideon S. Grader | Chemical Engineering


Chemistry and Materials

The Technology

Piezoelectric ultrasonic motors offer important advantages for motion applications where high speed is coupled with high precision. The advances made in the recent decades in the field of ultrasonic motor based motion solutions allow the construction of complete motion platforms in the fields of semiconductors, aerospace and electro-optics. The developed technology is a multilayer actuator (MLA), a composite part made from layers of a piezoceramic material (PZT), having a thickness of ~200 micron which are coated with a patterned metallic (Ag-Pd alloys) layers (some 5 micron thick) serving as electrodes. When excited by a proper electric signal the MLA undergoes a controlled profile and amplitude distortion. This process may be used for transferring a mechanical impulse to another ceramic part thus putting it into motion or effectuating other operations on it (for instance closing and opening a valve or moving a lens). MLA makes possible the reduction of the driving voltage and thus simplification and cost reduction of the driving electronics and enlargement of the displacement/actuator size ratio per voltage. The main parameters considered for defining MLA performance are the extent, force applied and accuracy of the distortion profile and cycles repeatability. Such parts are used in a multitude of civilian, aerospace and military applications like: electron microscope specimen arrangement, video camera focus setting device, machining tools, mirror or lens position adjustment, ink-jet pumps, flight control devices, helicopter fuselage vibration reductors, robots and others.


  • Cost reduction; superior performance; reduction of voltage ; enlargement of the displacement/actuator size ratio per voltage

Applications and Opportunities

  • Motion platforms in the fields of semiconductors, aerospace and electro-optics
arrow Business Development Contacts
Shikma Litmanovitz
Director of Business Development, Physical Science