The Technology
In clean manufacturing environments such as in the semi-conductor industry, transferring items such as wafers, glass, screens and other flat objects might cause to their contamination due to splashes from lubricants for example.
A method and a device to carry flat object on a controlled layer of high-pressure air without the need to physically contact the object with any hard machines was developed. The method not only reduces contamination but rather act to clean the surface of the flat objects which reduces a major concern in the production and inspection process of electronic components and other clean environment.
High amplitude traveling and standing waves are produced by highly efficient electromechanical device that creates standing and traveling waves between the flat object and a surface below it by manipulation of the pressure in the air layer between the sutfaces.
The direction and composition of the waves can be controlled precisely by means of external forces. The wave structure may translate and rotate the flat objects
Advantages
- Control of flat objects motion in several directions
- No need for air-pumping or pumps – using clean gas (or air) that doesn’t contain particles or oil residue
- Suitable for clean-room environment
Applications and Opportunities
- Chip, glass and displays manufacturer for production and inspection processes